The INFICON helium leak detector UL3000 Fab (PLUS) is designed for the needs of leak testing in semiconductor applications. It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.
UL3000 Fab (PLUS) – Helium Leak Detector (Dry)
Description
FAST RESULTS
The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs. The HYDRO-S software in the UL3000 Fab PLUS eliminates the water vapour background and makes leak testing even faster.
The UL3000 Fab PLUS offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length.
ROTATABLE AND REMOTE CONTROLLABLE DISPLAY
The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (PLUS) is possible via smartphone or tablet – without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.
SLIM DESIGN FOR ADVANCED MANEUVERABILITY
A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (PLUS) even in tight spaces.
Advantages
• Ready to measure at atmospheric pressure
• Intuitive user guidance with touch display
• Robust vacuum system, insensitive to dirt and contamination
• Perfect mobility due to small turning radius
• Operable by smartphone via web browser
• Accessories available right at the device
Typical Applications
• Leak testing of components before they are installed in existing tools
• Inspections and installations of process gas systems
• Automatic testing of hermetically sealed components with the TC1000 test chamber
• Leak tests in environments with high demands on test conditions and cleanliness
| Type | Helium Leak Detector UL3000 Fab (PLUS) | |
|---|---|---|
| Min detectable leak rate for Helium ( Vacuum mode ) | mbar•L/s | <5E-12 |
| Min. detectable leak rate for Helium (Sniffer mode) | mbar•L/s | < 5 • 10-8 |
| Max. Inlet pressure MASSIVE mode | mbar | 1000 |
| Max. Inlet pressure FINE mode | mbar | 2 |
| Max. Inlet pressure ULTRA mode | mbar | 0.4 |
| Pumping speed during evacuation | m³/h | > 30 at 50 Hz |
| Helium pumping speed ULTRA mode | L/s | 4 |
| Detectable masses | 2,3,4 amu | |
| Mass spectrometer Sector field | 180 ° | |
| Filaments ion source Iridium/Yttria coated | 2 | |
| Calibrated built-in leak | mbar•L/s | ∼ 10-7 |
| Test port | DN 25 KF | 1 |
| Adjustable triggers | 4 | |
| Interface | 2 x USB, Ethernet / LAN | |
| Permissable ambient temperature (during operation) | °C | +10…+40 |
| In/Outputs | Via I/O 1000 module | |
| Type of protection | IP 20 | |
| Weight | kg | 110 |
| lb | 242 | |
| Dimensions (l x w x h) | mm | 1068 x 525 x 850 |
| in | 42 x 21 x 34 | |
| Supply voltage | V (ac) | 100…240 V (+/-10% ) 50/60 Hz |
| Power consumption | VA | Typical 700, max. 1500 |
| Part Number | Description |
|---|---|
| 550-200 | ULTRATEST UL3000 Fab |
| 550-250 | ULTRATEST UL3000 Fab PLUS |
| Part Number | Description |
|---|---|
| 14005 | SL200, Sniffer Probe for UL1000/5000/Modul1000, 4m length |
| 525-001 | SL3000-3,sniffer line 3m length |
| 525-002 | SL3000-5,sniffer line 5m length |
| 525-003 | SL3000-10, sniffer line 10m length |
| 551-005 | TC1000Test Chamber,DN25KF,ESD wrist band |
| 551-010 | Remote Control RC1000C, wired, with 4m coiled cable |
| 551-015 | Remote Control RC1000WL, wireless, incl. wireless transmitter |
| 551-201 | Helium Bottle Holder for UL3000 Fab |
| 560-310 | I/O 1000 module |
| 560-335 | Data Cable 5 m |
| 560-340 | Data Cable 10 m |
